"Thickness Dependence of Solution Deposited HfOx Sensing Membrane for Electrolyte-Insulator-Semiconductor (EIS) Structures"
작성자
SEMATEC
작성일
2015-01-06 01:58
조회
1570
"Thickness Dependence of Solution Deposited HfOx Sensing Membrane for Electrolyte-Insulator-Semiconductor (EIS) Structures", In-Kyu Lee and Won-Ju Cho, Journal of Sensor Science and Technology, Vol. 22, No. 2, pp. 61-65, 2013. 06.