EQUIPMENT

Alpha Step (Surface profiler) Vertical Low-pressure Furnace Tube Furnace (Oxidation) Sputter (Metal-oxide semiconductor) Spin Coater Semiconductor sputter system RTA Oxidation Furnace RTA (Rapid Thermal Anneal) System RIE (Reactive Ion Etching) system Probe Station Oven Optical Microscope microwave Metal Sputter Keithley 428 Current Amplifier~ Keithley 428 Current Amplifier IR Furnace HP 8110A Pulse Generator HP 4284A Semiconductor Parameter Analyzer HP4156B HP 4155A Semiconductor Parameter Analyzer high-k sputter glove box Furnace (Box) Ellipsometer E-Beam2 E-Beam Contact Aligner (Karl Suss MJB3) CMP (Chemical-Mechanical Polisher)
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Alpha Step (Surface profiler)
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