"Development of NI Silicidation Process and Schottky Barrier SOI MOSFET Using Low ThermalBudget Microwave Annealing"
작성자
성훈 김
작성일
2021-02-22 07:05
조회
963
Development of NI Silicidation Process and Schottky Barrier SOI MOSFET Using Low ThermalBudget Microwave Annealing
2020.11.03 The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (http://www.enge2020.org/)
2020.11.03 The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (http://www.enge2020.org/)